Project Description

FS Series – Pneumatic Drive Bellows Pump

Compact, all-temperature rated, low-cost, air-driven bellows pump

Iwaki America’s FS is a compact, all-temperature rated, low-cost, air-driven, bellows pump series designed for the semiconductor industry, chemical delivery or recirculation. This pump handles high temperature nitride etch and piranha etch applications with ease. FS features intelligent drive technology and leak sensing, with a significant cost savings over previous models, and a 2-year warranty.