High Purity Pumps

Iwaki America provides fluid handling solutions to the Semiconductor equipment industry. High purity metering pumps are provided for on-tool chemical generation and chemical concentration management. As the leader in surface preparation recirculation pumps, our high purity pumps are the choice for CMP, etch/strip, and copper solution handling.

MDM Series

350 GPM / 1325 LPM

MDM Series

Max. Capacity:
350 GPM / 1325 LPM
Liquid Temperature Range:
32-300° F / 0-150° C

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FF/FF-H Series

11.6 GPM / 45 LPM

FF/FF-H Series

Max. Capacity:
11.6 GPH / 45 LPM
Max. Pressure: 45 PSI
Strokes per minute: 120 SPM
Liquid Temperature Range:
41-356° F / 5-180° C

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FA Series

10.6 GPM / 20 LPM

FA Series

Max. Capacity:
10.6 GPH / 20 LPM
Max. Pressure: 57 PSI
Strokes per minute: 150 SPM
Liquid Temperature Range:
41-212° F / 5-100° C

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FW/FW-H Series

12.9 GPM / 50 LPM

FW/FW-H Series

Max. Capacity:
12.9 GPH / 50 LPM
Max. Pressure: 43 PSI
Strokes per minute: 120 SPM
Liquid Temperature Range:
50-356° F / 10-180° C

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FS Series

14.5 GPM / 55 LPM

FS Series

Max. Capacity:
14.5 GPH / 55 LPM
Max. Pressure: 75 PSI
Strokes per minute: 240 SPM
Liquid Temperature Range:
41-356° F / 5-180° C

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FLP-60W Series

13.2 GPM / 50 LPM

FLP-60W Series

Max. Capacity:
13.2 GPH / 50 LPM
Max. Pressure: 72.5 PSI
Strokes per minute: 160 SPM
Liquid Temperature Range:
41-356° F / 5-180° C

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PDS Series

5 mL/shot

PDS Series

Max. Capacity:
5 mL/shot
Max. Pressure: 0.15 MPa
Liquid Temperature Range
59-77° F / 15-25° C

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CFD Series

1 mL/shot

CFD Series

Max. Capacity:
1 mL/shot
Max. Pressure: 7.25 PSI
Strokes per minute: 30 SPM
Liquid Temperature Range
68-140° F / 5-180° C

 

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