High Purity Pumps
Iwaki America provides fluid handling solutions to the semiconductor equipment industry. High purity metering pumps are provided for on-tool chemical generation and chemical concentration management. As the leader in surface preparation recirculation pumps, our high purity pumps are the choice for CMP, etch/strip, and copper solution handling. Iwaki pumps are ideal for all of your high purity applications. From dosing to recirculation and transfer, Iwaki has a pump for your clean chemical needs.
MDM Series
350 GPM / 1325 LPMMDM Series
Max. Capacity:
350 GPM / 1325 LPM
Liquid Temperature Range:
32-300° F / 0-150° C
FF/FF-H Series
11.6 GPM / 45 LPMFF/FF-H Series
Max. Capacity:
11.6 GPH / 45 LPM
Max. Pressure: 45 PSI
Strokes per minute: 120 SPM
Liquid Temperature Range:
41-356° F / 5-180° C
FA Series
10.6 GPM / 20 LPMFA Series
Max. Capacity:
10.6 GPH / 20 LPM
Max. Pressure: 57 PSI
Strokes per minute: 150 SPM
Liquid Temperature Range:
41-212° F / 5-100° C
FW/FW-H Series
12.9 GPM / 50 LPMFW/FW-H Series
Max. Capacity:
12.9 GPH / 50 LPM
Max. Pressure: 43 PSI
Strokes per minute: 120 SPM
Liquid Temperature Range:
50-356° F / 10-180° C
FS Series
14.5 GPM / 55 LPMFS Series
Max. Capacity:
14.5 GPH / 55 LPM
Max. Pressure: 75 PSI
Strokes per minute: 240 SPM
Liquid Temperature Range:
41-356° F / 5-180° C
FLP-60W Series
13.2 GPM / 50 LPMFLP-60W Series
Max. Capacity:
13.2 GPH / 50 LPM
Max. Pressure: 72.5 PSI
Strokes per minute: 160 SPM
Liquid Temperature Range:
41-356° F / 5-180° C
PDS Series
5 mL/shotPDS Series
Max. Capacity:
5 mL/shot
Max. Pressure: 0.15 MPa
Liquid Temperature Range
59-77° F / 15-25° C
CFD Series
1 mL/shotCFD Series
Max. Capacity:
1 mL/shot
Max. Pressure: 7.25 PSI
Strokes per minute: 30 SPM
Liquid Temperature Range
68-140° F / 5-180° C
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