Project Description

PDS Series Photoresist Dispensing Pump

Repeatable accuracy of 0.3% of the discharge volume is maintained at all times.

    • Repeated precision: ±0.3% (F.S.)
    • Linearity: ±0.5% (F.S.)
    • Resolution: 0.01 ml or below

For more information about applications relating to the PDS pump, please email customer service at info@iwakiamerica.com